V.I. Perekrestov, A.S. Kornyushchenko, & I.V. Zahaiko. Formation of Silicon Carbide Films by Magnetron Sputtering of Compound Carbon-silicon Target. Sumy State University.
Chicago Style (17th ed.) CitationV.I. Perekrestov, A.S. Kornyushchenko, and I.V. Zahaiko. Formation of Silicon Carbide Films by Magnetron Sputtering of Compound Carbon-silicon Target. Sumy State University.
MLA (9th ed.) CitationV.I. Perekrestov, et al. Formation of Silicon Carbide Films by Magnetron Sputtering of Compound Carbon-silicon Target. Sumy State University.
Warning: These citations may not always be 100% accurate.