The effect of three-minute exposure of oxygen plasma on the properties of tin oxide films

Research devoted to the effect of three-minute exposure of oxygen plasma on the properties of tin oxide films investigation. The films were obtained by sol-gel method from five-water tin tetrachloride solution. The concentration of tin ions in the SnCl4/EtOH film-forming system was 0.14 mol/l. The...

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Bibliographic Details
Main Authors: Е.А. Дмитриева, И.А. Лебедев, Е.А. Грушевская, Д.О. Мурзалинов, А.С. Серикканов, Н.М. Томпакова, А.И. Федосимова, А.Т. Темиралиев
Format: Article
Language:English
Published: Academician Ye.A. Buketov Karaganda University 2020-09-01
Series:Қарағанды университетінің хабаршысы. Физика сериясы
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Online Access:https://phs.buketov.edu.kz/index.php/physics-vestnik/article/view/383
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