Effect of substrate temperature on properties of WS2 thin films
Abstract The WS2 thin films were deposited on glass substrates with RF magnetron sputtering using a WS2 target to study the effect of substrate temperature (25, 100, 200, and 300 °C) on their properties. In this study, we investigated the morphological, structural, and optical characteristics of the...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-08916-0 |
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