High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications

High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications

This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and...

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Bibliographic Details
Main Authors:	Dan Vasilache, Claudia Nastase, George Boldeiu, Monica Nedelcu, Catalin Parvulescu, Adrian Dinescu, Alexandru Muller
Format:	Article
Language:	English
Published:	MDPI AG 2025-01-01
Series:	Micromachines
Subjects:	SAW sensor humidity SiO<sub>2</sub>
Online Access:	https://www.mdpi.com/2072-666X/16/2/150
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