High Q GaN/SiC-Based SAW Resonators for Humidity Sensor Applications
This paper presents the simulation and experimental results for high-frequency surface acoustic wave (SAW) sensors for humidity detection. The SAW structures with a wavelength of 680 nm are fabricated on GaN/SiC and presented two resonance frequencies: ~6.66 GHz for the Rayleigh propagation mode and...
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/2/150 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|