Evaporation of Adherent Al-Films on Single Crystalline LiNbO3 Substrates
LiNbO3 is used as a single crystalline substrate material for the manufacturing of surface acoustic wave devices as frequency selective components. On the polished substrate wafer, Al with a film thickness of about 400 nm is evaporated in a high vacuum.
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
1992-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/1992/20790 |
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