Features of Manufacturing the Element Base of High-Temperature Electronics Using Laser Radiation
The paper presents the results of research on laser processing of natural and artificial diamond crystals in microelectronics technologies by thermal laser separation. An analysis of physical-chemical phenomena observed as a result of the thermal effect of laser radiation on anisotropic materials in...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2025-04-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/4114 |
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