Sensitivity analysis of nems cantilever to detect volatile organic compounds using finite element method
Nano Electro Mechanical System (NEMS) based cantilever is the alternate form of Micro Electro Mechanical system (MEMS) with dimensional changes in perspectives like Thickness, length, and width. The advantage of the dimensional change leads to great improvement in sensitivity and performance with p...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2023-06-01
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| Series: | Kuwait Journal of Science |
| Online Access: | https://journalskuwait.org/kjs/index.php/KJS/article/view/20501 |
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