Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relation...

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Bibliographic Details
Main Authors:	A.P. Kuzmenko, A.E. Kuzko, Naw Dint, Myo Min Than, M.B. Dobromyslov, S.G. Emelyanov, L.M. Chervyakov
Format:	Article
Language:	English
Published:	Sumy State University 2015-12-01
Series:	Журнал нано- та електронної фізики
Subjects:	Nanostructure Magnetron method Ceramic Substrat
Online Access:	http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04095.pdf
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