Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate
The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relation...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-12-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04095.pdf |
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