Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate
The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relation...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-12-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04095.pdf |
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| author | A.P. Kuzmenko A.E. Kuzko Naw Dint Myo Min Than M.B. Dobromyslov S.G. Emelyanov L.M. Chervyakov |
| author_facet | A.P. Kuzmenko A.E. Kuzko Naw Dint Myo Min Than M.B. Dobromyslov S.G. Emelyanov L.M. Chervyakov |
| author_sort | A.P. Kuzmenko |
| collection | DOAJ |
| description | The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found. |
| format | Article |
| id | doaj-art-bb36751d7f594a43876dc7973d26d11e |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-12-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-bb36751d7f594a43876dc7973d26d11e2025-08-20T02:19:21ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-12-017404095-104095-3Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic SubstrateA.P. Kuzmenko0A.E. Kuzko1Naw Dint2Myo Min Than3M.B. Dobromyslov4S.G. Emelyanov5L.M. Chervyakov6South-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaSouth-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaSouth-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaSouth-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaPacific National University, 136, Tikhookeanskaya St., 680035 Khabarovsk, RussiaSouth-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaSouth-West State University, 94, 50 let Oktyabrya St., 305040 Kursk, RussiaThe present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found.http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04095.pdfNanostructureMagnetron methodCeramic Substrat |
| spellingShingle | A.P. Kuzmenko A.E. Kuzko Naw Dint Myo Min Than M.B. Dobromyslov S.G. Emelyanov L.M. Chervyakov Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate Журнал нано- та електронної фізики Nanostructure Magnetron method Ceramic Substrat |
| title | Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate |
| title_full | Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate |
| title_fullStr | Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate |
| title_full_unstemmed | Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate |
| title_short | Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate |
| title_sort | nanostructure changes of magnetron copper films with a glass ceramic substrate |
| topic | Nanostructure Magnetron method Ceramic Substrat |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04095.pdf |
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