Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures
The investigations directed on identification of growth mechanisms of ferroelectric thin films of lead zirconate titanate (PZT) on the oxidized silicon substrates are described in the work. It is shown that the growth rate of a ferroelectric film is equal to about 15-18 nm/min, and films are formed...
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| Format: | Article |
| Language: | English |
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Sumy State University
2015-10-01
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| Series: | Журнал нано- та електронної фізики |
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| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/3/articles/jnep_2015_V7_03036.pdf |
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| author | D.A. Kovalenko V.V. Petrov |
| author_facet | D.A. Kovalenko V.V. Petrov |
| author_sort | D.A. Kovalenko |
| collection | DOAJ |
| description | The investigations directed on identification of growth mechanisms of ferroelectric thin films of lead zirconate titanate (PZT) on the oxidized silicon substrates are described in the work. It is shown that the growth rate of a ferroelectric film is equal to about 15-18 nm/min, and films are formed by the Stransky-Krastanov mechanism. Results of the theoretical study of the internal mechanical stresses arising because of the difference in the coefficients of thermal expansion of materials of a silicon substrate, oxidized silicon underlayer and a PZT film are given. Results of the pilot studies of internal mechanical stresses which coincide with the calculated results in the thickness range of PZT films of 100-300 nm are presented. |
| format | Article |
| id | doaj-art-b9e24a7cef68475ba44e9c97f1bb61ae |
| institution | OA Journals |
| issn | 2077-6772 |
| language | English |
| publishDate | 2015-10-01 |
| publisher | Sumy State University |
| record_format | Article |
| series | Журнал нано- та електронної фізики |
| spelling | doaj-art-b9e24a7cef68475ba44e9c97f1bb61ae2025-08-20T02:00:29ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-10-017303036-103036-6Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT StructuresD.A. Kovalenko0V.V. Petrov1South Federal University, 2, Chekhova Str., 347900 Taganrog, RussiaSouth Federal University, 2, Chekhova Str., 347900 Taganrog, RussiaThe investigations directed on identification of growth mechanisms of ferroelectric thin films of lead zirconate titanate (PZT) on the oxidized silicon substrates are described in the work. It is shown that the growth rate of a ferroelectric film is equal to about 15-18 nm/min, and films are formed by the Stransky-Krastanov mechanism. Results of the theoretical study of the internal mechanical stresses arising because of the difference in the coefficients of thermal expansion of materials of a silicon substrate, oxidized silicon underlayer and a PZT film are given. Results of the pilot studies of internal mechanical stresses which coincide with the calculated results in the thickness range of PZT films of 100-300 nm are presented.http://jnep.sumdu.edu.ua/download/numbers/2015/3/articles/jnep_2015_V7_03036.pdfMechanical stressesFerroelectric filmsSilicon substrateZirconate titanateMechanisms of growth of film |
| spellingShingle | D.A. Kovalenko V.V. Petrov Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures Журнал нано- та електронної фізики Mechanical stresses Ferroelectric films Silicon substrate Zirconate titanate Mechanisms of growth of film |
| title | Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures |
| title_full | Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures |
| title_fullStr | Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures |
| title_full_unstemmed | Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures |
| title_short | Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures |
| title_sort | researches of the internal mechanical stresses arising in si sio2 pzt structures |
| topic | Mechanical stresses Ferroelectric films Silicon substrate Zirconate titanate Mechanisms of growth of film |
| url | http://jnep.sumdu.edu.ua/download/numbers/2015/3/articles/jnep_2015_V7_03036.pdf |
| work_keys_str_mv | AT dakovalenko researchesoftheinternalmechanicalstressesarisinginsisio2pztstructures AT vvpetrov researchesoftheinternalmechanicalstressesarisinginsisio2pztstructures |