Researches of the Internal Mechanical Stresses Arising in Si-SiO2-PZT Structures
The investigations directed on identification of growth mechanisms of ferroelectric thin films of lead zirconate titanate (PZT) on the oxidized silicon substrates are described in the work. It is shown that the growth rate of a ferroelectric film is equal to about 15-18 nm/min, and films are formed...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/3/articles/jnep_2015_V7_03036.pdf |
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