High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application
The microstructures on flexible membrane substrate prepared by the traditional methods may introduce large morphology and position errors, making it hard to achieve clear imaging. In this paper, we present a high precision fabrication method composed of two steps: unstressed fixation of the polyimid...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9104935/ |
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