High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application

High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application

The microstructures on flexible membrane substrate prepared by the traditional methods may introduce large morphology and position errors, making it hard to achieve clear imaging. In this paper, we present a high precision fabrication method composed of two steps: unstressed fixation of the polyimid...

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Bibliographic Details
Main Authors: Xin Liu, Changchang Gong, Bin Fan, Jiang Bian
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Photonics Journal
Subjects:
Flexible membrane
diffractive optical elements
polyimide
contact lithography
microstructure morphology error
wave-front error
Online Access:https://ieeexplore.ieee.org/document/9104935/
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https://ieeexplore.ieee.org/document/9104935/

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