High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application
The microstructures on flexible membrane substrate prepared by the traditional methods may introduce large morphology and position errors, making it hard to achieve clear imaging. In this paper, we present a high precision fabrication method composed of two steps: unstressed fixation of the polyimid...
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| Format: | Article |
| Language: | English |
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IEEE
2020-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/9104935/ |
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| author | Xin Liu Changchang Gong Bin Fan Jiang Bian |
| author_facet | Xin Liu Changchang Gong Bin Fan Jiang Bian |
| author_sort | Xin Liu |
| collection | DOAJ |
| description | The microstructures on flexible membrane substrate prepared by the traditional methods may introduce large morphology and position errors, making it hard to achieve clear imaging. In this paper, we present a high precision fabrication method composed of two steps: unstressed fixation of the polyimide membrane and high precision fabrication of diffractive microstructures on the flexible membrane substrate. By using precise spin-coating technology, we get 25 μm thick polyimide membranes, whose coefficient of thermal expansion is almost zero. To prepare high precision microstructures, we propose an aerated membrane method, by which the flexible membrane substrate and the photoresist on it can attach tightly to the mask under the air pressure difference between the upper and lower surfaces of the membrane substrate during the contact lithography. The results show that the wave-front error obtained by this method is less than 1/30λ RMS (F# = 25@632.8 nm) at 400 mm aperture, indicating the microstructures have excellent morphologies and high position accuracy. |
| format | Article |
| id | doaj-art-b9e07bf3f6da4cbc905ad5bb105ac925 |
| institution | Kabale University |
| issn | 1943-0655 |
| language | English |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-b9e07bf3f6da4cbc905ad5bb105ac9252025-08-20T03:30:57ZengIEEEIEEE Photonics Journal1943-06552020-01-0112411010.1109/JPHOT.2020.29989179104935High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging ApplicationXin Liu0https://orcid.org/0000-0002-5006-8375Changchang Gong1Bin Fan2Jiang Bian3Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaInstitute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, ChinaThe microstructures on flexible membrane substrate prepared by the traditional methods may introduce large morphology and position errors, making it hard to achieve clear imaging. In this paper, we present a high precision fabrication method composed of two steps: unstressed fixation of the polyimide membrane and high precision fabrication of diffractive microstructures on the flexible membrane substrate. By using precise spin-coating technology, we get 25 μm thick polyimide membranes, whose coefficient of thermal expansion is almost zero. To prepare high precision microstructures, we propose an aerated membrane method, by which the flexible membrane substrate and the photoresist on it can attach tightly to the mask under the air pressure difference between the upper and lower surfaces of the membrane substrate during the contact lithography. The results show that the wave-front error obtained by this method is less than 1/30λ RMS (F# = 25@632.8 nm) at 400 mm aperture, indicating the microstructures have excellent morphologies and high position accuracy.https://ieeexplore.ieee.org/document/9104935/Flexible membranediffractive optical elementspolyimidecontact lithographymicrostructure morphology errorwave-front error |
| spellingShingle | Xin Liu Changchang Gong Bin Fan Jiang Bian High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application IEEE Photonics Journal Flexible membrane diffractive optical elements polyimide contact lithography microstructure morphology error wave-front error |
| title | High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application |
| title_full | High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application |
| title_fullStr | High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application |
| title_full_unstemmed | High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application |
| title_short | High Precision Fabrication Method of Fresnel Diffractive Lenses on Ultrathin Membrane for Imaging Application |
| title_sort | high precision fabrication method of fresnel diffractive lenses on ultrathin membrane for imaging application |
| topic | Flexible membrane diffractive optical elements polyimide contact lithography microstructure morphology error wave-front error |
| url | https://ieeexplore.ieee.org/document/9104935/ |
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