Frequency trimming of superconducting qubits using RF-biased ICP annealing

Frequency trimming of superconducting qubits using RF-biased ICP annealing

We propose a novel method for post-fabrication frequency trimming of superconducting qubits via RF-biased inductively coupled plasma (ICP) annealing. Junction resistance systematically increases with RF bias power, achieving a maximum increase of approximately 40% under O _2 plasma and up to 180% un...

Full description

Saved in:
Bibliographic Details
Main Authors: Zhi-Long Jia, Lei Du, Hao-Ran Tao, Yong Chen, Hui Yang, Chi Zhang, Guo-Liang Xu, Long Shen, Wang-Sheng Xu, Nian-Ci Wang, Peng Duan, Guo-Ping Guo
Format: Article
Language:English
Published: IOP Publishing 2025-01-01
Series:Applied Physics Express
Subjects:
superconducting qubits
anneal
quantum computing
Online Access:https://doi.org/10.35848/1882-0786/addd5b
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://doi.org/10.35848/1882-0786/addd5b

Similar Items