The Fabrication and Characterization of Surface-Acoustic-Wave and Resistive Types of Ozone Sensors Based on Zinc Oxide: A Comparative Study
Micro-Electro-Mechanical System (MEMS) technology is employed to fabricate surface acoustic wave (SAW)-type and resistive-type ozone sensors on quartz glass (SiO<sub>2</sub>) substrates. The fabrication process commences by using a photolithography technique to define interdigitated elec...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-04-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/9/2723 |
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