Development of a Piezoelectric-Driven XYθ<sub>z</sub> Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration

Development of a Piezoelectric-Driven XYθ<sub>z</sub> Nano-Positioning Stage with High Load-Bearing Capacity Enabled by Over-Constrained Guiding Configuration

A novel over-constrained XYθ<sub>z</sub> nano-positioning stage with a high load-bearing capacity is proposed. This serially connected displacement stage adopts an embedded structural design that integrates a translation stage with a rotation stage in series. The Z-axis amplification mec...

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Bibliographic Details
Main Authors: Bin Liu, Lingchen Meng, Shuaishuai Lu, Fei Wang, Pengbo Liu, Peng Yan
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Micromachines
Subjects:
hybrid amplification mechanism
over-constrained
high load bearing
out-of-plane deformation
nanopositioning stage
Online Access:https://www.mdpi.com/2072-666X/16/5/548
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