Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules
The electron-impact ionization and partial ionization cross sections are reported for few silicon-chlorine molecules using semi-empirical methods. The partial ionization cross sections are determined using a modified version of the binary-encounter-Bethe model. In this approach, the binary-encounter...
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2025-07-01
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| author | Savinder Kaur Ajay Kumar Arora Kasturi Lal Baluja Anand Bharadvaja |
| author_facet | Savinder Kaur Ajay Kumar Arora Kasturi Lal Baluja Anand Bharadvaja |
| author_sort | Savinder Kaur |
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| description | The electron-impact ionization and partial ionization cross sections are reported for few silicon-chlorine molecules using semi-empirical methods. The partial ionization cross sections are determined using a modified version of the binary-encounter-Bethe model. In this approach, the binary-encounter-Bethe model is modified through a two-step process, namely, transforming the binding energies of the occupied orbitals and introducing a scaling factor. The scaling can be done using either the mass spectrometry data or experimental values of cross sections. It correctly adjusts the scaling term of the BEB model so that the order of magnitude of resulting partial ionization cross sections is the same as that of experimental values. Further, the use of the experimental value of ionization and appearance energy values ensures that the cross sections have a correct threshold. This further mitigates the dependence of cross sections on energy at low values. The role of the scaling factor and the behavior of branching ratios is also examined at different energies. The species whose partial ionization cross sections are reported are highly relevant in plasma processing. However, the proposed model can be extended to any multi-centerd molecular structures comprising a large number of atoms or electrons, except in cases where resonance effects or additional ionization channels become significant. The mass spectrometry data is of utmost importance in computing partial ionization cross sections in order to obtain reliable results. |
| format | Article |
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| institution | Kabale University |
| issn | 2218-2004 |
| language | English |
| publishDate | 2025-07-01 |
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| spelling | doaj-art-b6bc4f3117b143a0934d49ac24007d992025-08-20T03:58:26ZengMDPI AGAtoms2218-20042025-07-011376410.3390/atoms13070064Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) MoleculesSavinder Kaur0Ajay Kumar Arora1Kasturi Lal Baluja2Anand Bharadvaja3Department of Physics, SGTB Khalsa College, University of Delhi, Delhi 110007, IndiaDepartment of Physics, Ramjas College, University of Delhi, Delhi 110007, IndiaDepartment of Physics and Astrophysics, University of Delhi, Delhi 110007, IndiaDepartment of Physics, Bhaskaracharya College of Applied Sciences, University of Delhi, Delhi 110075, IndiaThe electron-impact ionization and partial ionization cross sections are reported for few silicon-chlorine molecules using semi-empirical methods. The partial ionization cross sections are determined using a modified version of the binary-encounter-Bethe model. In this approach, the binary-encounter-Bethe model is modified through a two-step process, namely, transforming the binding energies of the occupied orbitals and introducing a scaling factor. The scaling can be done using either the mass spectrometry data or experimental values of cross sections. It correctly adjusts the scaling term of the BEB model so that the order of magnitude of resulting partial ionization cross sections is the same as that of experimental values. Further, the use of the experimental value of ionization and appearance energy values ensures that the cross sections have a correct threshold. This further mitigates the dependence of cross sections on energy at low values. The role of the scaling factor and the behavior of branching ratios is also examined at different energies. The species whose partial ionization cross sections are reported are highly relevant in plasma processing. However, the proposed model can be extended to any multi-centerd molecular structures comprising a large number of atoms or electrons, except in cases where resonance effects or additional ionization channels become significant. The mass spectrometry data is of utmost importance in computing partial ionization cross sections in order to obtain reliable results.https://www.mdpi.com/2218-2004/13/7/64dissociation ionizationscattering cross sectionsclose-coupling approximationsemi-empirical methodsbinary-encounter-Bethe-methodmass spectrometry |
| spellingShingle | Savinder Kaur Ajay Kumar Arora Kasturi Lal Baluja Anand Bharadvaja Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules Atoms dissociation ionization scattering cross sections close-coupling approximation semi-empirical methods binary-encounter-Bethe-method mass spectrometry |
| title | Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules |
| title_full | Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules |
| title_fullStr | Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules |
| title_full_unstemmed | Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules |
| title_short | Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules |
| title_sort | electron impact ionization and partial ionization cross sections of plasma relevant sicl sub i x i sub x 1 3 molecules |
| topic | dissociation ionization scattering cross sections close-coupling approximation semi-empirical methods binary-encounter-Bethe-method mass spectrometry |
| url | https://www.mdpi.com/2218-2004/13/7/64 |
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