Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules

Electron Impact Ionization and Partial Ionization Cross Sections of Plasma-Relevant SiCl<sub><i>x</i></sub> (x = 1–3) Molecules

The electron-impact ionization and partial ionization cross sections are reported for few silicon-chlorine molecules using semi-empirical methods. The partial ionization cross sections are determined using a modified version of the binary-encounter-Bethe model. In this approach, the binary-encounter...

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Bibliographic Details
Main Authors: Savinder Kaur, Ajay Kumar Arora, Kasturi Lal Baluja, Anand Bharadvaja
Format: Article
Language:English
Published: MDPI AG 2025-07-01
Series:Atoms
Subjects:
dissociation ionization
scattering cross sections
close-coupling approximation
semi-empirical methods
binary-encounter-Bethe-method
mass spectrometry
Online Access:https://www.mdpi.com/2218-2004/13/7/64
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