Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer

Abstract Metal-oxide thin-film semiconductors have been highlighted as next-generation space semiconductors owing to their excellent radiation hardness based on their dimensional advantages of very low thickness and insensitivity to crystal structure. However, thin-film transistors (TFTs) do not exh...

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Main Authors: Yongsu Lee, Hae-Won Lee, Su Jin Kim, Jeong Min Park, Byoung Hun Lee, Chang Goo Kang
Format: Article
Language:English
Published: SpringerOpen 2025-01-01
Series:Nano Convergence
Subjects:
Online Access:https://doi.org/10.1186/s40580-025-00474-5
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author Yongsu Lee
Hae-Won Lee
Su Jin Kim
Jeong Min Park
Byoung Hun Lee
Chang Goo Kang
author_facet Yongsu Lee
Hae-Won Lee
Su Jin Kim
Jeong Min Park
Byoung Hun Lee
Chang Goo Kang
author_sort Yongsu Lee
collection DOAJ
description Abstract Metal-oxide thin-film semiconductors have been highlighted as next-generation space semiconductors owing to their excellent radiation hardness based on their dimensional advantages of very low thickness and insensitivity to crystal structure. However, thin-film transistors (TFTs) do not exhibit intrinsic radiation hardness owing to the chemical reactions at the interface exposed to ambient air. In this study, significantly enhanced radiation hardness of Al2O3-passivated ZnO TFTs against high-energy protons with energies of up to 100 MeV is obtained owing to the passivation layer blocking interactions with external reactants, thereby maintaining the chemical stability of the thin-film semiconductor. These results highlight the potential of passivated metal-oxide thin films for developing reliable radiation-hardened semiconductor devices that can be used in harsh space environments. In addition, the relationship between low-frequency noise and defects due to oxygen vacancies was revealed, which can be utilized to improve device reliability.
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institution Kabale University
issn 2196-5404
language English
publishDate 2025-01-01
publisher SpringerOpen
record_format Article
series Nano Convergence
spelling doaj-art-b6a3438877964028a1d79b22375aadfc2025-02-02T12:36:39ZengSpringerOpenNano Convergence2196-54042025-01-0112111010.1186/s40580-025-00474-5Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layerYongsu Lee0Hae-Won Lee1Su Jin Kim2Jeong Min Park3Byoung Hun Lee4Chang Goo Kang5Advanced Radiation Technology Institute, Korea Atomic Energy Research InstituteCenter for Semiconductor Technology Convergence, Department of Electrical Engineering, Pohang University of Science and TechnologyAdvanced Radiation Technology Institute, Korea Atomic Energy Research InstituteAdvanced Radiation Technology Institute, Korea Atomic Energy Research InstituteCenter for Semiconductor Technology Convergence, Department of Electrical Engineering, Pohang University of Science and TechnologyAdvanced Radiation Technology Institute, Korea Atomic Energy Research InstituteAbstract Metal-oxide thin-film semiconductors have been highlighted as next-generation space semiconductors owing to their excellent radiation hardness based on their dimensional advantages of very low thickness and insensitivity to crystal structure. However, thin-film transistors (TFTs) do not exhibit intrinsic radiation hardness owing to the chemical reactions at the interface exposed to ambient air. In this study, significantly enhanced radiation hardness of Al2O3-passivated ZnO TFTs against high-energy protons with energies of up to 100 MeV is obtained owing to the passivation layer blocking interactions with external reactants, thereby maintaining the chemical stability of the thin-film semiconductor. These results highlight the potential of passivated metal-oxide thin films for developing reliable radiation-hardened semiconductor devices that can be used in harsh space environments. In addition, the relationship between low-frequency noise and defects due to oxygen vacancies was revealed, which can be utilized to improve device reliability.https://doi.org/10.1186/s40580-025-00474-5Radiation hardeningProton irradiationThin-film semiconductorZnOPassivation
spellingShingle Yongsu Lee
Hae-Won Lee
Su Jin Kim
Jeong Min Park
Byoung Hun Lee
Chang Goo Kang
Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
Nano Convergence
Radiation hardening
Proton irradiation
Thin-film semiconductor
ZnO
Passivation
title Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
title_full Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
title_fullStr Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
title_full_unstemmed Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
title_short Enhanced high-energy proton radiation hardness of ZnO thin-film transistors with a passivation layer
title_sort enhanced high energy proton radiation hardness of zno thin film transistors with a passivation layer
topic Radiation hardening
Proton irradiation
Thin-film semiconductor
ZnO
Passivation
url https://doi.org/10.1186/s40580-025-00474-5
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