Passivation of a Conductive System of Integrated Circuits with a Layer of Aluminum Nitride
Passivation of the film conductive system of integrated circuits makes it more reliable by increasing the resistance to electromigration. The problem of manufacturing a passivating layer on the formed current-conducting system of an integrated circuit, obtained in a single technological cycle, inclu...
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| Format: | Article |
| Language: | Russian |
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Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-06-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/3641 |
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