Aluminum Scandium Nitride as a Functional Material at 1000 °C

Aluminum Scandium Nitride as a Functional Material at 1000 °C

Abstract Aluminum scandium nitride (AlScN) has emerged as a highly promising material for high‐temperature applications due to its robust piezoelectric, ferroelectric, and dielectric properties. This study investigates the behavior of Al0.7Sc0.3N thin films in extreme thermal environments, demonstra...

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Bibliographic Details
Main Authors: Venkateswarlu Gaddam, Shaurya S. Dabas, Jinghan Gao, David J. Spry, Garrett Baucom, Nicholas G. Rudawski, Tete Yin, Ethan Angerhofer, Philip G. Neudeck, Honggyu Kim, Philip X.‐L. Feng, Mark Sheplak, Roozbeh Tabrizian
Format: Article
Language:English
Published: Wiley-VCH 2025-05-01
Series:Advanced Electronic Materials
Subjects:
AlScN
d33,f
electromechanical coupling coefficient
extreme environment
ferroelectric
high temperature
Online Access:https://doi.org/10.1002/aelm.202400849
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https://doi.org/10.1002/aelm.202400849

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