A Flexible PCB-Based MEMS Field Mill with a Vertical Movement Shutter Driven by an Electrostatic Actuator
This paper describes a simulated MEMS field mill that utilizes a vertical movement shutter powered by an electrostatic actuator. The design is based upon a Flexible PCB substrate to enable faster prototyping and lower cost. The simulation results show that if the system operates at a resonance, a 10...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-04-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/201 |
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