Beam phase measuring deflectometry featuring physics-compliant object-image mapping

Phase measuring deflectometry has been proven as a competitive technique for measuring complex optical surfaces. However, the commonly used imaging model simply treats the light beam associated with each camera pixel as a single ray, which in turn leads to significant measurement errors for complex...

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Main Authors: Yunuo Chen, Xiangchao Zhang, Wei Lang, Ting Chen, Xingman Niu, Xiangqian Jiang
Format: Article
Language:English
Published: AIP Publishing LLC 2025-05-01
Series:APL Photonics
Online Access:http://dx.doi.org/10.1063/5.0249433
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author Yunuo Chen
Xiangchao Zhang
Wei Lang
Ting Chen
Xingman Niu
Xiangqian Jiang
author_facet Yunuo Chen
Xiangchao Zhang
Wei Lang
Ting Chen
Xingman Niu
Xiangqian Jiang
author_sort Yunuo Chen
collection DOAJ
description Phase measuring deflectometry has been proven as a competitive technique for measuring complex optical surfaces. However, the commonly used imaging model simply treats the light beam associated with each camera pixel as a single ray, which in turn leads to significant measurement errors for complex surfaces with high curvedness, low reflectivity, or nonideal specularity. To broaden the measurable scope of deflectometry, beam phase measuring deflectometry is proposed. A beam imaging model is developed by defining a discrete light field function and assigning a beam composed of a set of rays to each camera pixel. The conventional framework of the one-to-one mapping between the points on the screen, camera, and surface under test is broken through for the first time, enabling a direct physics-compliant description of the imaging process in deflectometric measurement. The flexibility of the imaging model is guaranteed by a set of tunable parameters, and the difficulty of intensity quantification of images is bypassed through phase rendering. The proposed method shows superior accuracy over traditional approaches for complex surfaces, which reduces the measurement errors from an order of micrometers to hundreds of nanometers, while maintaining numerical reliability and measurement efficiency.
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institution Kabale University
issn 2378-0967
language English
publishDate 2025-05-01
publisher AIP Publishing LLC
record_format Article
series APL Photonics
spelling doaj-art-b2f398fb4c0b4a348a7314d69ef4307e2025-08-20T03:37:30ZengAIP Publishing LLCAPL Photonics2378-09672025-05-01105056116056116-1110.1063/5.0249433Beam phase measuring deflectometry featuring physics-compliant object-image mappingYunuo Chen0Xiangchao Zhang1Wei Lang2Ting Chen3Xingman Niu4Xiangqian Jiang5Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, ChinaShanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, School of Information Science and Technology, Fudan University, Shanghai 200438, ChinaFuture Metrology Hub, University of Huddersfield, Huddersfield HD1 3DH, United KingdomPhase measuring deflectometry has been proven as a competitive technique for measuring complex optical surfaces. However, the commonly used imaging model simply treats the light beam associated with each camera pixel as a single ray, which in turn leads to significant measurement errors for complex surfaces with high curvedness, low reflectivity, or nonideal specularity. To broaden the measurable scope of deflectometry, beam phase measuring deflectometry is proposed. A beam imaging model is developed by defining a discrete light field function and assigning a beam composed of a set of rays to each camera pixel. The conventional framework of the one-to-one mapping between the points on the screen, camera, and surface under test is broken through for the first time, enabling a direct physics-compliant description of the imaging process in deflectometric measurement. The flexibility of the imaging model is guaranteed by a set of tunable parameters, and the difficulty of intensity quantification of images is bypassed through phase rendering. The proposed method shows superior accuracy over traditional approaches for complex surfaces, which reduces the measurement errors from an order of micrometers to hundreds of nanometers, while maintaining numerical reliability and measurement efficiency.http://dx.doi.org/10.1063/5.0249433
spellingShingle Yunuo Chen
Xiangchao Zhang
Wei Lang
Ting Chen
Xingman Niu
Xiangqian Jiang
Beam phase measuring deflectometry featuring physics-compliant object-image mapping
APL Photonics
title Beam phase measuring deflectometry featuring physics-compliant object-image mapping
title_full Beam phase measuring deflectometry featuring physics-compliant object-image mapping
title_fullStr Beam phase measuring deflectometry featuring physics-compliant object-image mapping
title_full_unstemmed Beam phase measuring deflectometry featuring physics-compliant object-image mapping
title_short Beam phase measuring deflectometry featuring physics-compliant object-image mapping
title_sort beam phase measuring deflectometry featuring physics compliant object image mapping
url http://dx.doi.org/10.1063/5.0249433
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