Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings
This paper demonstrates the influence of deposition parameters (temperature, power and time) and stoichiometric composition of thin aluminum nitride (AlN) coatings, the thickness of which varied from 320 to 1100[Formula: see text]nm deposited by DC reactive magnetron sputtering on their microstructu...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
World Scientific Publishing
2025-08-01
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| Series: | Journal of Advanced Dielectrics |
| Subjects: | |
| Online Access: | https://www.worldscientific.com/doi/10.1142/S2010135X25400041 |
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