Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings

Effect of temperature and deposition power on microstructure and properties of magnetron sputtered thin AlN coatings

This paper demonstrates the influence of deposition parameters (temperature, power and time) and stoichiometric composition of thin aluminum nitride (AlN) coatings, the thickness of which varied from 320 to 1100[Formula: see text]nm deposited by DC reactive magnetron sputtering on their microstructu...

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Main Authors: Vasilina Lapitskaya, Andrey Nikolaev, Anastasiya Khabarava, Evgeniy Sadyrin, Sergei Aizikovich, Anaid Azoyan, Dmitry Kotov, Sergei Chizhik, Guangbin Yu, Weifu Sun
Format: Article
Language:English
Published: World Scientific Publishing 2025-08-01
Series:Journal of Advanced Dielectrics
Subjects:
AlN coating
magnetron sputtering
microstructure
mechanical and microtribological properties
specific electrical resistivity
Online Access:https://www.worldscientific.com/doi/10.1142/S2010135X25400041
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https://www.worldscientific.com/doi/10.1142/S2010135X25400041

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