Comparison of Two Different Circular Diaphragm Models with Central Mass for MEMS Based FPI Pressure Sensor Performance Based on Sensitivity and Frequency Response
The sensitivity and the fundamental frequency of membrane with central mass (embossment) were analytically evaluated. Two different previously developed model (named as M1 and M2) of center embossment diaphragm were considered to obtain results. According to the results, it was noted that M1 struct...
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Format: | Article |
Language: | English |
Published: |
Sakarya University
2021-06-01
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Series: | Sakarya Üniversitesi Fen Bilimleri Enstitüsü Dergisi |
Subjects: | |
Online Access: | https://dergipark.org.tr/tr/download/article-file/1105427 |
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