Oxide Membranes from Bulk Micro‐Machining of SrTiO3 Substrates
Abstract Suspended micro‐structures made of epitaxial complex oxides rely on surface micro‐machining processes based on sacrificial layers. These processes prevent to physically access the microstructures from both sides, as substantial part of the substrate is not removed. In this work, a bulk micr...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2025-05-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202412683 |
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