Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit

Abstract Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity...

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Bibliographic Details
Main Authors: Sean P. Bommer, Christopher Panuski, Benoit Guilhabert, Zhongyi Xia, Jack A. Smith, Martin D. Dawson, Dirk Englund, Michael J. Strain
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-60957-1
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