Transfer printing micro-assembly of silicon photonic crystal cavity arrays: beating the fabrication tolerance limit
Abstract Photonic crystal cavities (PhCCs) can confine optical fields in ultra-small volumes, enabling efficient light-matter interactions for quantum and non-linear optics, sensing and all-optical signal processing. The inherent nanometric tolerances of micro-fabrication platforms can induce cavity...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-025-60957-1 |
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