Novel Technique for Backside Alignment Using Direct Laser Writing
Backside alignment is a key microfabrication process step, especially in micro-electromechanical systems (MEMS). The double-side mask aligners used for this purpose are unaffordable for many research centres. We propose a new method that aligns the backside mask to the features on the topside using...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/3/255 |
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