Polishing performance of magnetorheological elastomer pad for single-crystal silicon
Single-crystal silicon optical components are extensively utilized in sophisticated high-end equipment, such as X-ray space telescopes and high-energy laser systems. Despite their widespread use, the ultra-precision polishing of these components is constrained by low processing determinacy and slugg...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-05-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785425012426 |
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