Simulation study on impact characteristics of RF microsystem based on bulk silicon MEMS process

The high overload impact test is costly and time consuming, and the failure detection means are few, so it is difficult to locate the weak points of the structure. In this paper the impact response spectrum and transient dynamics method are used to study the impact load response of a RF microsystem...

Full description

Saved in:
Bibliographic Details
Main Authors: Feng Zhengsen, Wang Lu, Zeng Yanping, Yang Bing, Qi Dong, Wang Zhihui, Zhang Rui
Format: Article
Language:zho
Published: National Computer System Engineering Research Institute of China 2024-02-01
Series:Dianzi Jishu Yingyong
Subjects:
Online Access:http://www.chinaaet.com/article/3000163480
Tags: Add Tag
No Tags, Be the first to tag this record!