Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz
Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requi...
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| Format: | Article |
| Language: | English |
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Wiley
2025-03-01
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| Series: | Advanced Science |
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| Online Access: | https://doi.org/10.1002/advs.202411825 |
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| author | Wan Wang Maciej Baranski Yabin Jin Roland Salut Djaffar Belharet Jean‐Michel Friedt Yongdong Pan Yanxun Xiang Fu‐zhen Xuan Abdelkrim Khelif Sarah Benchabane |
| author_facet | Wan Wang Maciej Baranski Yabin Jin Roland Salut Djaffar Belharet Jean‐Michel Friedt Yongdong Pan Yanxun Xiang Fu‐zhen Xuan Abdelkrim Khelif Sarah Benchabane |
| author_sort | Wan Wang |
| collection | DOAJ |
| description | Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on‐chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y‐cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on‐demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on‐chip SAW metasurfaces for diverse potential applications at micro‐ and nanoscale. |
| format | Article |
| id | doaj-art-a98a06f78da145ac8cfc5da58ae1b20e |
| institution | OA Journals |
| issn | 2198-3844 |
| language | English |
| publishDate | 2025-03-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Science |
| spelling | doaj-art-a98a06f78da145ac8cfc5da58ae1b20e2025-08-20T01:49:41ZengWileyAdvanced Science2198-38442025-03-011212n/an/a10.1002/advs.202411825Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHzWan Wang0Maciej Baranski1Yabin Jin2Roland Salut3Djaffar Belharet4Jean‐Michel Friedt5Yongdong Pan6Yanxun Xiang7Fu‐zhen Xuan8Abdelkrim Khelif9Sarah Benchabane10School of Aerospace Engineering and Applied Mechanics Tongji University Shanghai 200092 ChinaCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceShanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power Engineering East China University of Science and Technology Shanghai 200237 ChinaCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceSchool of Aerospace Engineering and Applied Mechanics Tongji University Shanghai 200092 ChinaShanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power Engineering East China University of Science and Technology Shanghai 200237 ChinaShanghai Key Laboratory of Intelligent Sensing and Detection Technology School of Mechanical and Power Engineering East China University of Science and Technology Shanghai 200237 ChinaCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceCNRS, FEMTO‐ST Université de Franche‐Comté 15B avenue des Montboucons Besançon F‐25000 FranceAbstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on‐chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y‐cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on‐demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on‐chip SAW metasurfaces for diverse potential applications at micro‐ and nanoscale.https://doi.org/10.1002/advs.202411825microfabrication processon chip metasurfacescattered wavesubwavelength focusingsurface acoustic waves |
| spellingShingle | Wan Wang Maciej Baranski Yabin Jin Roland Salut Djaffar Belharet Jean‐Michel Friedt Yongdong Pan Yanxun Xiang Fu‐zhen Xuan Abdelkrim Khelif Sarah Benchabane Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz Advanced Science microfabrication process on chip metasurface scattered wave subwavelength focusing surface acoustic waves |
| title | Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz |
| title_full | Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz |
| title_fullStr | Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz |
| title_full_unstemmed | Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz |
| title_short | Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz |
| title_sort | experimental realization of on chip surface acoustic wave metasurfaces at sub ghz |
| topic | microfabrication process on chip metasurface scattered wave subwavelength focusing surface acoustic waves |
| url | https://doi.org/10.1002/advs.202411825 |
| work_keys_str_mv | AT wanwang experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT maciejbaranski experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT yabinjin experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT rolandsalut experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT djaffarbelharet experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT jeanmichelfriedt experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT yongdongpan experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT yanxunxiang experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT fuzhenxuan experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT abdelkrimkhelif experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz AT sarahbenchabane experimentalrealizationofonchipsurfaceacousticwavemetasurfacesatsubghz |