Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz

Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz

Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requi...

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Bibliographic Details
Main Authors: Wan Wang, Maciej Baranski, Yabin Jin, Roland Salut, Djaffar Belharet, Jean‐Michel Friedt, Yongdong Pan, Yanxun Xiang, Fu‐zhen Xuan, Abdelkrim Khelif, Sarah Benchabane
Format: Article
Language:English
Published: Wiley 2025-03-01
Series:Advanced Science
Subjects:
microfabrication process
on chip metasurface
scattered wave
subwavelength focusing
surface acoustic waves
Online Access:https://doi.org/10.1002/advs.202411825
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https://doi.org/10.1002/advs.202411825

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