Experimental Realization of On‐Chip Surface Acoustic Wave Metasurfaces at Sub‐GHz
Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requi...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2025-03-01
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| Series: | Advanced Science |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/advs.202411825 |
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| Summary: | Abstract Metasurfaces, consisting of subwavelength‐thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on‐chip surface acoustic wave (SAW) at sub‐GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on‐chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y‐cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on‐demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on‐chip SAW metasurfaces for diverse potential applications at micro‐ and nanoscale. |
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| ISSN: | 2198-3844 |