Research on a New Method of Macro–Micro Platform Linkage Processing for Large-Format Laser Precision Machining

In recent years, the macro–micro structure (servo platform for macro motion and galvanometer for micro motion) composed of a galvanometer and servo platform has been gradually applied to laser processing in order to address the increasing demand for high-speed, high-precision, and large-format preci...

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Bibliographic Details
Main Authors: Longjie Xiong, Haifeng Ma, Zheng Sun, Xintian Wang, Yukui Cai, Qinghua Song, Zhanqiang Liu
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Micromachines
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Online Access:https://www.mdpi.com/2072-666X/16/2/177
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