Research on a New Method of Macro–Micro Platform Linkage Processing for Large-Format Laser Precision Machining
In recent years, the macro–micro structure (servo platform for macro motion and galvanometer for micro motion) composed of a galvanometer and servo platform has been gradually applied to laser processing in order to address the increasing demand for high-speed, high-precision, and large-format preci...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/2/177 |
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