Can MEMS-based particulate matter sensors reliably measure mass?
Micro-electro-mechanical systems (MEMS) have emerged as promising candidates for particulate matter (PM) mass sensing due to their high sensitivity and integration potential. However, their practical deployment is hindered by unresolved challenges in calibration and sensor behavior interpretation un...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-06-01
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| Series: | Sensing and Bio-Sensing Research |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2214180425000674 |
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