Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 %...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-12-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04099.pdf |
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