Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications
Abstract In conventional nondispersive infrared (NDIR) gas sensors, a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases. Therefore, the multiplexed NDIR gas sensor requires multiple pairs of narrowband filters, which is not...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-01-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00851-w |
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