APA (7th ed.) Citation

Jun, S., Baek, I., Park, S., Choi, E. H., Yoon, J., Jeon, I., . . . Yang, Y. Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory. Nature Portfolio.

Chicago Style (17th ed.) Citation

Jun, Sunhong, et al. Near-field Terahertz Time-domain Spectroscopy for In-line Electrical Metrology of Semiconductor Integration Processes for Memory. Nature Portfolio.

MLA (9th ed.) Citation

Jun, Sunhong, et al. Near-field Terahertz Time-domain Spectroscopy for In-line Electrical Metrology of Semiconductor Integration Processes for Memory. Nature Portfolio.