Thermomigration of non-oriented aluminium-rich liquid zones through (110) silicon wafers

The paper analyzes the reasons and factors that allow avoiding faceting of non-oriented linear zones. It is shown that in the manufacture of semiconductor chips with a large perimeter and a reverse voltage of 2000 V, the conditions sine qua non to create isolating walls on silicon wafers with an ori...

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Bibliographic Details
Main Authors: Оlекsіі Polukhin, Vitalii Kravchina
Format: Article
Language:English
Published: Politehperiodika 2021-12-01
Series:Tekhnologiya i Konstruirovanie v Elektronnoi Apparature
Subjects:
Online Access:https://tkea.com.ua/index.php/journal/article/view/70
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