Influence of ion beam current on the structural, optical, and mechanical properties of TiO2 coatings: ion beam-assisted vs conventional electron beam evaporation
In this paper, comparative studies of selected properties of titanium dioxide (TiO2) coatings deposited using electron beam evaporation (EBE) and ion beam-assisted deposition (IBAD) are presented. Post-process annealing at 800 °C was also conducted to examine its impact on the properties of the prep...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2025-07-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.16.81 |
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