Towards multi-dimensional atomic-level measurement: integrated heterodyne grating interferometer with zero dead-zone
This study proposes a novel heterodyne grating interferometer designed to meet the multi-dimensional atomic-level measurement demands of next-generation lithography systems and large-scale atomic-level manufacturing. By utilizing a dual-frequency laser source, the interferometer enables simultaneous...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Light Publishing Group
2025-08-01
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| Series: | Light: Advanced Manufacturing |
| Subjects: | |
| Online Access: | https://www.light-am.com/article/doi/10.37188/lam.2025.040 |
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