Towards multi-dimensional atomic-level measurement: integrated heterodyne grating interferometer with zero dead-zone

Towards multi-dimensional atomic-level measurement: integrated heterodyne grating interferometer with zero dead-zone

This study proposes a novel heterodyne grating interferometer designed to meet the multi-dimensional atomic-level measurement demands of next-generation lithography systems and large-scale atomic-level manufacturing. By utilizing a dual-frequency laser source, the interferometer enables simultaneous...

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Bibliographic Details
Main Authors: Can Cui, Lvye Gao, Pengbo Zhao, Menghan Yang, Lifu Liu, Yu Ma, Guangyao Huang, Shengtong Wang, Linbin Luo, Xinghui Li
Format: Article
Language:English
Published: Light Publishing Group 2025-08-01
Series:Light: Advanced Manufacturing
Subjects:
grating interferometer
integrated
atomic
dead-zone
multi-axis measurement
degree-of-freedom
Online Access:https://www.light-am.com/article/doi/10.37188/lam.2025.040
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https://www.light-am.com/article/doi/10.37188/lam.2025.040

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