Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum

Abstract Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam anal...

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Bibliographic Details
Main Authors:	Asunción Fernández, M. Carmen Jiménez de Haro, Dirk Hufschmidt, Olga Montes, Thierry Sauvage, F. Javier Ferrer, Amaël Caillard, Pascal Brault, Anne-Lise Thomann
Format:	Article
Language:	English
Published:	Nature Portfolio 2025-07-01
Series:	Scientific Reports
Subjects:	Helium assisted magnetron sputtering of Co, Si and Zr 4He and 3He charged thin films Helium release by thermal annealing Nanobubbles and nanopores Microstructural characterization IBA analysis
Online Access:	https://doi.org/10.1038/s41598-025-06889-8
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Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum

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