Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum

Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum

Abstract Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam anal...

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Main Authors: Asunción Fernández, M. Carmen Jiménez de Haro, Dirk Hufschmidt, Olga Montes, Thierry Sauvage, F. Javier Ferrer, Amaël Caillard, Pascal Brault, Anne-Lise Thomann
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Scientific Reports
Subjects:
Helium assisted magnetron sputtering of Co, Si and Zr
4He and 3He charged thin films
Helium release by thermal annealing
Nanobubbles and nanopores
Microstructural characterization
IBA analysis
Online Access:https://doi.org/10.1038/s41598-025-06889-8
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https://doi.org/10.1038/s41598-025-06889-8

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