Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum
Abstract Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam anal...
Saved in:
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
|
| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-06889-8 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849238781923688448 |
|---|---|
| author | Asunción Fernández M. Carmen Jiménez de Haro Dirk Hufschmidt Olga Montes Thierry Sauvage F. Javier Ferrer Amaël Caillard Pascal Brault Anne-Lise Thomann |
| author_facet | Asunción Fernández M. Carmen Jiménez de Haro Dirk Hufschmidt Olga Montes Thierry Sauvage F. Javier Ferrer Amaël Caillard Pascal Brault Anne-Lise Thomann |
| author_sort | Asunción Fernández |
| collection | DOAJ |
| description | Abstract Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). Helium desorption was investigated by IBA in a dedicated chamber for “in situ” thermal evolution in vacuum. The simultaneous recording of the helium and matrix-element signals shows different behaviors of the different matrix elements (i.e. Co, Si and Zr) and deposition conditions (i.e., DC or RF discharge modes and dynamic or quasistatic vacuum). Effusion, blistering, delamination and flaking have been observed for the different samples leading to the formation of nano-porous/nanostructured thin films. The methodology is being envisaged as a process for nanostructured thin-films fabrication with potential applications. |
| format | Article |
| id | doaj-art-a156730c375e483dbc263abff709f4ca |
| institution | Kabale University |
| issn | 2045-2322 |
| language | English |
| publishDate | 2025-07-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Scientific Reports |
| spelling | doaj-art-a156730c375e483dbc263abff709f4ca2025-08-20T04:01:24ZengNature PortfolioScientific Reports2045-23222025-07-0115111410.1038/s41598-025-06889-8Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuumAsunción Fernández0M. Carmen Jiménez de Haro1Dirk Hufschmidt2Olga Montes3Thierry Sauvage4F. Javier Ferrer5Amaël Caillard6Pascal Brault7Anne-Lise Thomann8Institute of Materials Science of Seville (CSIC-Univ. Seville)Institute of Materials Science of Seville (CSIC-Univ. Seville)Institute of Materials Science of Seville (CSIC-Univ. Seville)Institute of Materials Science of Seville (CSIC-Univ. Seville)CEMHTI Laboratory, CNRS-UPR3079National Center of Accelerators, CNA (Univ. Seville, J. Andalucía, CSIC)CNRS, GREMI-UMR7344CNRS, GREMI-UMR7344CNRS, GREMI-UMR7344Abstract Sputtering of cobalt, silicon and zirconium in a helium magnetron discharge (MS) is reported as a bottom-up procedure to obtain He-charged films (i.e. 4He and 3He filled nanopores encapsulated in the matrix material). Composition and microstructural analyses are presented from ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). Helium desorption was investigated by IBA in a dedicated chamber for “in situ” thermal evolution in vacuum. The simultaneous recording of the helium and matrix-element signals shows different behaviors of the different matrix elements (i.e. Co, Si and Zr) and deposition conditions (i.e., DC or RF discharge modes and dynamic or quasistatic vacuum). Effusion, blistering, delamination and flaking have been observed for the different samples leading to the formation of nano-porous/nanostructured thin films. The methodology is being envisaged as a process for nanostructured thin-films fabrication with potential applications.https://doi.org/10.1038/s41598-025-06889-8Helium assisted magnetron sputtering of Co, Si and Zr4He and 3He charged thin filmsHelium release by thermal annealingNanobubbles and nanoporesMicrostructural characterizationIBA analysis |
| spellingShingle | Asunción Fernández M. Carmen Jiménez de Haro Dirk Hufschmidt Olga Montes Thierry Sauvage F. Javier Ferrer Amaël Caillard Pascal Brault Anne-Lise Thomann Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum Scientific Reports Helium assisted magnetron sputtering of Co, Si and Zr 4He and 3He charged thin films Helium release by thermal annealing Nanobubbles and nanopores Microstructural characterization IBA analysis |
| title | Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| title_full | Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| title_fullStr | Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| title_full_unstemmed | Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| title_short | Microstructure and composition evolution of He charged solid-gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| title_sort | microstructure and composition evolution of he charged solid gas nanocomposite films of different matrix elements during thermal annealing in vacuum |
| topic | Helium assisted magnetron sputtering of Co, Si and Zr 4He and 3He charged thin films Helium release by thermal annealing Nanobubbles and nanopores Microstructural characterization IBA analysis |
| url | https://doi.org/10.1038/s41598-025-06889-8 |
| work_keys_str_mv | AT asuncionfernandez microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT mcarmenjimenezdeharo microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT dirkhufschmidt microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT olgamontes microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT thierrysauvage microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT fjavierferrer microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT amaelcaillard microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT pascalbrault microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum AT annelisethomann microstructureandcompositionevolutionofhechargedsolidgasnanocompositefilmsofdifferentmatrixelementsduringthermalannealinginvacuum |