High-temperature epitaxial growth of tantalum nitride thin films on MgO: structural evolution and potential for SQUID applications

High-temperature epitaxial growth of tantalum nitride thin films on MgO: structural evolution and potential for SQUID applications

The growth of superconducting tantalum nitride (TaN) thin films on magnesium oxide (MgO) substrates has been studied using pulsed laser deposition (PLD). This research investigates the influence of varying deposition parameters, including substrate temperature and ambient gas composition, on the str...

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Bibliographic Details
Main Authors: Michelle Cedillo Rosillo, Oscar Contreras López, Jesús Antonio Díaz, Agustín Conde Gallardo, Harvi A. Castillo Cuero
Format: Article
Language:English
Published: Beilstein-Institut 2025-05-01
Series:Beilstein Journal of Nanotechnology
Subjects:
epitaxial growth
squid
structural evolution
superconductivity
tan thin films
Online Access:https://doi.org/10.3762/bjnano.16.53
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